Abstract
Autonomous experimentation has emerged as an efficient approach to acceleratethe pace of materials discovery. Although instruments for autonomous synthesishave become popular in molecular and polymer science, solution processing ofhybrid materials and nanoparticles, examples of autonomous tools for physicalvapour deposition are scarce yet important for the semiconductor industry.Here, we report the design and implementation of an autonomous instrument forsputter deposition of thin films with controlled composition, leveraging ahighly automated sputtering reactor custom-controlled by Python, opticalemission spectroscopy (OES), and Bayesian optimization algorithm. We modeledfilm composition, measured by x-ray fluorescence, as a linear function ofemission lines monitored during the co-sputtering from elemental Zn and Titargets in N$_2$ atmosphere. A Bayesian control algorithm, informed by OES,navigates the space of sputtering power to fabricate films with user-definedcomposition, by minimizing the absolute error between desired and measuredemission signals. We validated our approach by autonomously fabricatingZn$_x$Ti$_{1-x}$N$_y$ films with deviations from the targeted cationcomposition within relative 3.5 %, even for 15 nm thin films, demonstratingthat the proposed approach can reliably synthesize thin films with specificcomposition and minimal human interference. Moreover, the proposed method canbe extended to more difficult synthesis experiments where plasma intensitydepends non-linearly on pressure, or the elemental sticking coefficientsstrongly depend on the substrate temperature.